Dr. Yu-Feng Lin, Director of the Illinois Water Resources Center, University of Illinois Champaign-Urbana, was warmly welcomed by faculty of the Taiwan Semiconductor Manufacturing Company (TSMC) Academy 15B wafer plant/Phase 5 (Fab 15B/P5) in Taichung, Taiwan, for a site visit on June 17, together with colleagues from the National Taiwan University (NTU), who helped arrange the visit. The Phase 5 facility and its neighbors function as zero-waste demonstration plants, implementing advanced chemical recycling programs to reduce the company’s carbon footprint. P5 is an integral part of TSMC’s larger Fab 15 complex, and the TSMC Academy on the Fab 15 Taichung campus functions as a replica cleanroom training hub. Discussion points during their 9:30 am to 2:00 pm visit included (1) water resources management between the city, the technology park, and TSMC facilities; (2) the water reuse and waste recycling process; (3) energy management from the national scale to the fab scale; and (4) water and energy distribution between the manufacturing process and facility operations. This information exchange will help pave the way for future collaboration with the NTU and TSMC, a collaboration that is hoped will assist the development of the new Illinois Quantum and Microelectronics Park (IQMP) on Chicago’s South Side. The IQMP is rapidly emerging as a massive deep-tech campus dedicated to scaling quantum computers and advanced microelectronics.







